SiC synthesis by a plasma deposition process - Concepedia

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SiC synthesis by a plasma deposition process

36

Citations

13

References

1981

Year

Hideo Yoshihara, Hidefumi Mori, Mikiho Kiuchi

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringApplied PhysicsSic SynthesisPlasma ProcessingCarbide

References

	Year	Citations

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