Engineering strained silicon on insulator wafers with the Smart CutTM technology - Concepedia

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Engineering strained silicon on insulator wafers with the Smart CutTM technology

114

Citations

25

References

2004

Year

B. Ghyselen, Jean‐Michel Hartmann, T. Ernst, C. Aulnette, B. Osternaud, Y. Bogumilowicz, Alexandra Abbadie, P. Besson, O. Rayssac, Antoine Tiberj,

Solid-State Electronics

Insulator WafersSemiconductor TechnologyElectrical EngineeringEngineeringSilicon DebuggingApplied PhysicsSmart Cuttm TechnologySemiconductor Device FabricationElectronic PackagingSilicon On InsulatorSemiconductor Device

References

	Year	Citations

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