Solid-State Electronics · 2004 · 117 citations · 25 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice ReliabilitySemiconductor DefectsSemiconductor Device MaterialsSemiconductor ReliabilitySilicon MaterialsStrain EngineeringSilicon On Insulator MicromachiningSilicon WafersSilicon-on-insulator ProcessingSilicon-on-insulator TechnologyStrain Effects
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Massimo V. Fischetti, Zhibin Ren, P. M. Solomon et al. · Journal of Applied Physics · 2003 · 481 citations