Engineering strained silicon on insulator wafers with the Smart CutTM technology

B. Ghyselen, Jean‐Michel Hartmann, T. Ernst, C. Aulnette, B. Osternaud, Y. Bogumilowicz, Alexandra Abbadie, P. Besson, O. Rayssac, Antoine Tiberj,

Solid-State Electronics · 2004 · 117 citations · 25 references

Concepts

References

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