Publication | Closed Access
Transient enhanced diffusion in preamorphized silicon: the role of the surface
49
Citations
13
References
1999
Year
Materials ScienceEngineeringDiffusion ResistancePhysicsSurface ScienceApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationPreamorphized SiliconSilicon On Insulator
| Year | Citations | |
|---|---|---|
Page 1
Page 1