Publication | Closed Access
Mainstreaming of the SOI technology
39
Citations
4
References
1999
Year
Unknown Venue
EngineeringVlsi DesignComputer ArchitectureTechnology AssessmentSilicon On InsulatorSocial SciencesAdvanced Packaging (Semiconductors)Soa GovernanceNanoelectronicsElectronic PackagingTechnology TransferMainstream TechnologyElectrical EngineeringSoi TechnologyTechnology InfrastructureComputer EngineeringSemiconductor Device FabricationInformation ManagementSame LithographyMicroelectronicsIndustrial DesignTechnologyMicrofabricationApplied PhysicsHuman-computer InteractionScience And Technology StudiesIndustrial InformaticsBeyond CmosOptoelectronics
Partially-depleted deep sub-micron CMOS on SOI technology is becoming a mainstream technology. This technology offers 20-35% performance gain over a bulk technology implemented with the same lithography. In this paper, the challenges of mainstreaming the SOI technology in device, material, technology and circuit terms are described.
| Year | Citations | |
|---|---|---|
Page 1
Page 1