Imprint lithography with sub-10 nm feature size and high throughput

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching

Amit Kumar, George M. Whitesides · Applied Physics Letters · 1993 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanoscale patterning and oxidation of H-passivated Si(100)-2×1 surfaces with an ultrahigh vacuum scanning tunneling microscope

Joseph W. Lyding, T. C. Shen, J. S. Hubacek et al. · Applied Physics Letters · 1994 · 490 citations

Natural Sciences, Materials Engineering, Materials Science +17

Imaging and modification of polymers by scanning tunneling and atomic force microscopy

T. R. Albrecht, Moris Dovek, C. A. Lang et al. · Journal of Applied Physics · 1988 · 165 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Lithography with the scanning tunneling microscope

M. A. McCord, R. F. W. Pease · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 152 citations

Engineering, Materials Engineering, Materials Science +16