Concepedia

A. N. Broers

AN

45

Publications

2.7K

Citations

29

H-Index

1965

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

University of Cambridge

IBM (United States)

Bridge University

A. N. Broers is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringPhysicsMicroscopyMicroelectronicsMicrofabricationNanotechnologyNanoelectronics

Publications per year

1965–1997

45

Publications

45

Electron-beam fabrication of 80-Å metal structures

A. N. Broers, W. W. Molzen, J. J. Cuomo et al. · Applied Physics Letters · 1976 · 305 citations

Materials Science, Materials Engineering, Engineering +15

Electron beam lithography—Resolution limits

A. N. Broers, A. C. F. Hoole, Joseph M. Ryan · Microelectronic Engineering · 1996 · 222 citations

Applied Physics, Electron-beam Lithography, Beam Lithography +1

250-Å linewidths with PMMA electron resist

A. N. Broers, J. M. E. Harper, W. W. Molzen · Applied Physics Letters · 1978 · 136 citations

Materials Science, Electrical Engineering, Engineering +15

Resolution limits for electron-beam lithography

A. N. Broers · IBM Journal of Research and Development · 1988 · 131 citations

Materials Science, Engineering, Electron-beam Lithography +15

Resolution Limits of PMMA Resist for Exposure with 50 kV Electrons

A. N. Broers · Journal of The Electrochemical Society · 1981 · 115 citations

Engineering, Electron-beam Lithography, Exposure Dose +22

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