Absence of resolution degradation in X-ray lithography for λ from 4.5nm to 0.83nm

High-resolution pattern replication using soft X rays

D. L. Spears, Henry I. Smith · Electronics Letters · 1972 · 210 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Techniques of Low Energy X-Ray Spectroscopy (0.1 to 2 keV Region)

Burton L. Henke, Murray A. Tester · Advances in X-ray Analysis · 1974 · 50 citations

Natural Sciences, Astronomy, Physics +13

X-ray optics : applications to solids

H. J. Queisser, A. Authier · 1977 · 48 citations

Natural Sciences, Materials Science, Physics +12

Replication of 0.1-μm geometries with x-ray lithography

R. Feder, Eberhard Spiller, J. Topalian · Journal of Vacuum Science and Technology · 1975 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +7

Energy dissipation in a thin polymer film by electron beam scattering: Experiment

R.J. Hawryluk, Henry I. Smith, Anna Elis Paz Soares et al. · Journal of Applied Physics · 1975 · 48 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15