Reactor and growth process optimization for growth of thick GaN layers on sapphire substrates by HVPE

E. Richter, Ch. Hennig, M. Weyers, Frank Habel, Jenq-Dar Tsay, W.-Y. Liu, Peter Brückner, F. Scholz, Yu.N. Makarov, A.S. Segal,

Journal of Crystal Growth · 2005 · 62 citations · 12 references

Concepts

References

12