Al- and N-polar AlN layers grown on c-plane sapphire substrates by modified flow-modulation MOCVD

M. Takeuchi, Hiroshi Shimizu, Ryo Kajitani, Koji Kawasaki, Toru Kinoshita, K Takada, Hisashi Murakami, Yoshinao Kumagai, Akinori Koukitu, T. Koyama,

Journal of Crystal Growth · 2007 · 76 citations · 26 references

Concepts

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