Capacitive polysilicon resonator with MOS detection circuit

Resonant-microbridge vapor sensor

Roger T. Howe, R.S. Muller · IEEE Transactions on Electron Devices · 1986 · 223 citations

Engineering, Electrical Engineering, Materials Science +16

Micromechanical accelerometer integrated with MOS detection circuitry

K. Petersen, A. Shartel, N.F. Raley · IEEE Transactions on Electron Devices · 1982 · 95 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Resonating microbridge mass flow sensor

S. Bouwstra, R. Legtenberg, H.A.C. Tilmans · Sensors and Actuators A Physical · 1990 · 92 citations · Full text

Engineering, Chemical Engineering, Instrumentation +6

Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 88 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +15

Very high Q-factor resonators in monocrystalline silicon

R.A. Buser, Ν. F. de Rooij · Sensors and Actuators A Physical · 1990 · 79 citations

Engineering, Materials Engineering, Materials Science +13