Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Etched silicon vibrating sensor

J. C. Greenwood · Journal of Physics E Scientific Instruments · 1984 · 118 citations

Single Crystal Silicon, Sensor Element, Vibrations +13

Electrochemically Controlled Thinning of Silicon

H.A. Waggener · Bell System Technical Journal · 1970 · 87 citations

Engineering, Integrated Circuits, Silicon On Insulator +18

Growth Process of Silicon Over SiO2 by CVD: Epitaxial Lateral Overgrowth Technique

L. Jastrzȩbski, J. F. Corboy, J. T. McGinn et al. · Journal of The Electrochemical Society · 1983 · 69 citations

Engineering, Silicon On Insulator, Growth Process +17

Novel optically excited resonant pressure sensor

K.E.B. Thornton, Deepak Uttamchandani, Brian Culshaw · Electronics Letters · 1988 · 26 citations

Photonics, Photonic Sensor, Optical Materials +15

Force Sensing Using Quartz Crystal Flexure Resonators

William C. Albert · 1984 · 24 citations

Engineering, Mechanical Engineering, Applied Physics +3