Kyoichi Ikeda

Silicon pressure sensor integrates resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 133 citations

Engineering, Silicon Pressure Sensor, Microfabrication +5

Vacuum-sealed silicon micromachined pressure sensors

Masayoshi Esashi, S. Sugiyama, Kyoichi Ikeda et al. · Proceedings of the IEEE · 1998 · 111 citations

Biomedical Sensors, Engineering, Micromachines +13

Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 88 citations

Engineering, Soft Robotics, Silicon Pressure Sensor +10

Various applications of resonant pressure sensor chip based on 3-D micromachining

Kinji Harada, Kyoichi Ikeda, Hideki Kuwayama et al. · Sensors and Actuators A Physical · 1999 · 69 citations

3-D Micromachining, Various Applications, Biomedical Sensors +9

New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams

Tsuyoshi Ikehara, Robert A. F. Zwijze, Kyoichi Ikeda · Journal of Micromechanics and Microengineering · 2000 · 37 citations