Concepedia

S. Sugiyama

SS

Statistics

Publications

38

Citations

1.1K

H-Index

21

Active since

1982

Affiliations

Ritsumeikan University(Current)

Toyota Central Research and Development Laboratories (Japan)

New Energy and Industrial Technology Development Organization

Toyota Motor Corporation (Switzerland)

National Institute of Advanced Industrial Science and Technology

S. Sugiyama is an author at Ritsumeikan University specializing in engineering, microfabrication, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical EngineeringElectrical EngineeringMicroelectronicsInstrumentationSensorsMaterial ScienceApplied PhysicsMechatronics

Publications per year

1982–2013

38

Publications

38

Vacuum-sealed silicon micromachined pressure sensors

Masayoshi Esashi, S. Sugiyama, Kyoichi Ikeda et al. · Proceedings of the IEEE · 1998 · 111 citations

Biomedical Sensors, Engineering, Micromachines +13

Analysis of piezoresistance in p-type silicon for mechanical sensors

Toshiyuki Toriyama, S. Sugiyama · Journal of Microelectromechanical Systems · 2002 · 100 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Single crystal silicon nano-wire piezoresistors for mechanical sensors

Toshiyuki Toriyama, Yasutada Tanimoto, S. Sugiyama · Journal of Microelectromechanical Systems · 2002 · 100 citations

Engineering, Mechanical Engineering, Silicon On Insulator +16

Micro-diaphragm pressure sensor

S. Sugiyama, Tomiko M. Suzuki, Ken Kawahata et al. · 1986 · 53 citations

Biomedical Sensors, Micro-diaphragm Pressure Sensor, Engineering +14

Mechanical property measurements of thin films using load-deflection of composite rectangular membrane

Osamu Tabata, Ken Kawahata, S. Sugiyama et al. · 2003 · 52 citations

Membrane Structure, Thin Film Physics, Engineering +23

Rows per page

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