S. Sugiyama

Vacuum-sealed silicon micromachined pressure sensors

Masayoshi Esashi, S. Sugiyama, Kyoichi Ikeda et al. · Proceedings of the IEEE · 1998 · 112 citations

Engineering, Electrical Engineering, Materials Science +17

Analysis of piezoresistance in p-type silicon for mechanical sensors

Toshiyuki Toriyama, S. Sugiyama · Journal of Microelectromechanical Systems · 2002 · 101 citations

Engineering, Materials Engineering, Materials Science +15

Single crystal silicon nano-wire piezoresistors for mechanical sensors

Toshiyuki Toriyama, Yasutada Tanimoto, S. Sugiyama · Journal of Microelectromechanical Systems · 2002 · 101 citations

Engineering, Materials Engineering, Materials Science +17

Micro-diaphragm pressure sensor

S. Sugiyama, Tomiko M. Suzuki, Ken Kawahata et al. · 1986 · 53 citations

Engineering, Bioengineering, Microelectromechanical Systems +14

Mechanical property measurements of thin films using load-deflection of composite rectangular membrane

Osamu Tabata, Ken Kawahata, S. Sugiyama et al. · 2003 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17