Publication | Closed Access
Micro-diaphragm pressure sensor
53
Citations
6
References
1986
Year
Unknown Venue
Biomedical SensorsMicro-diaphragm Pressure SensorEngineeringPressure MeasurementMicrofabricationSensorsMeasurementMechanical EngineeringPneumaticsMicromachinesSilicon Nitride DiaphragmEducationMicromachining TechniqueSensor DesignInstrumentationSensor TechnologyMicro-electromechanical System
A micro-diaphragm pressure sensor with silicon nitride diaphragm of 80 µm × 80 µm was fabricated by applying micromachining technique. The main feature is that it is a complete planar type pressure sensor formed by single-side processing solely on the top surface of
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