Keiichi Shimaoka

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

Micro-diaphragm pressure sensor

S. Sugiyama, Tomiko M. Suzuki, Ken Kawahata et al. · 1986 · 53 citations

Engineering, Bioengineering, Microelectromechanical Systems +14

Surface micromachined micro-diaphragm pressure sensors

S. Sugiyama, Keiichi Shimaoka, Osamu Tabata · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 52 citations

Engineering, Materials Engineering, Materials Science +17

2-axis MEMS scanner for a laser range finder

I. Aoyagi, Keiichi Shimaoka, Satoru Kato et al. · 2011 · 22 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +8

Micromachined sensors using polysilicon sacrificial layer etching technology

S. Sugiyama, Osamu Tabata, Keiichi Shimaoka et al. · 2002 · 11 citations

Engineering, Electrical Engineering, Materials Science +17