Concepedia

Kinji Harada

KH

3

Publications

290

Citations

3

H-Index

1990

Active since

Affiliations

Yokogawa Electric (Japan)(Current)

Kinji Harada is an author at Yokogawa Electric (Japan) specializing in microfabrication, instrumentation, and mechanical engineering.

Top concepts

Publications per year

1990–1999

3

Publications

3

Silicon pressure sensor integrates resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 133 citations

, , +5

Three-dimensional micromachining of silicon pressure sensor integrating resonant strain gauge on diaphragm

Kyoichi Ikeda, Hideki Kuwayama, Takashi Kobayashi et al. · Sensors and Actuators A Physical · 1990 · 88 citations

, , +10

Various applications of resonant pressure sensor chip based on 3-D micromachining

Kinji Harada, Kyoichi Ikeda, Hideki Kuwayama et al. · Sensors and Actuators A Physical · 1999 · 69 citations

, , +9

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