Concepedia

Silicon Diaphragms

Silicon Diaphragm is a microfabricated thin silicon membrane structure, distinguished by its precisely defined thickness and geometry, designed to deform elastically under applied pressure or stress in bulk micromachined sensors and transducers.

209

Publications

9.3K

Citations

595

Authors

185

Institutions

Publications per year

2017–2026

21

Parents

Publications

209

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 583 citations · Full text

, , +17

Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

Takahiro Namazu, Yoshitada Isono, Tomoki Tanaka · Journal of Microelectromechanical Systems · 2000 · 383 citations

, , +17

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

, , +17

Silicon Diffused-Element Piezoresistive Diaphragms

O. N. Tufte, P. W. Chapman, Donald Long · Journal of Applied Physics · 1962 · 268 citations · Full text

, , +17

TiNi (shape memory) films silicon for MEMS applications

René Wolf, A. H. Heuer · Journal of Microelectromechanical Systems · 1995 · 186 citations

, , +17

1–5 of 209

Authors

595

  1. KW
    K.D. Wise

    University of Michigan, United States

    10 publications · 813 citations

    10

    h-index

  2. HT
    Hidekuni Takao

    Toyohashi University of Technology, Japan

    6 publications · 283 citations

    6

    h-index

  3. KN
    K. Najafi

    University of Michigan, United States

    5 publications · 221 citations

    5

    h-index

  4. KS
    Kazuaki Sawada

    Toyohashi University of Technology, Japan

    5 publications · 232 citations

    5

    h-index

  5. PS
    P.R. Scheeper

    University of Twente, Netherlands

    5 publications · 265 citations

    5

    h-index

1–5 of 595

Institutions

185

  1. University of Michigan

    Ann Arbor, United States

    17 h-index

    38 publications

    2.6K citations

  2. Tohoku University

    Sendai, Japan

    9 h-index

    24 publications

    817 citations

  3. University of Twente

    Enschede, The Netherlands

    8 h-index

    28 publications

    1.4K citations

  4. Case Western Reserve University

    Cleveland, United States

    7 h-index

    19 publications

    1.4K citations

  5. Toyohashi University of Technology

    Toyohashi, Japan

    7 h-index

    25 publications

    967 citations

  6. Chinese Academy of Sciences

    Beijing, China

    6 h-index

    17 publications

    583 citations

  7. Institute of Microelectronics

    Beijing, China

    5 h-index

    17 publications

    628 citations

  8. Xi'an Jiaotong University

    Xi'an, China

    5 h-index

    21 publications

    526 citations

1–8 of 185

Venues

  1. Sensors and Actuators A Physical

    21 publications · 1.2K citations

    17

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 22 publications · 794 citations

    17

    h-index

  3. Journal of Microelectromechanical Systems

    16 publications · 1.2K citations

    14

    h-index

  4. IEEE Sensors Journal

    11 publications · 454 citations

    11

    h-index

  5. IEEE Transactions on Electron Devices

    8 publications · 764 citations

    8

    h-index

1–5