Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Abstract

In this paper the differential equations governing thin, square-diaphragm silicon pressure sensors are developed and solved using finite-difference numerical methods. Diaphragm deflection and stress patterns are presented in a normalized form applicable to diaphragms of arbitrary thickness and size. For 1-mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> 10-µm-thick diaphragms in