Concepedia

Capacitive Resonators

Capacitive Resonators is a type of MEMS resonator that employs electrostatic capacitance as the primary transduction mechanism to sense and drive mechanical vibrations, distinguishing it from other resonator types that utilize piezoelectric or magnetic coupling.

208

Publications

7.6K

Citations

667

Authors

206

Institutions

Publications per year

2017–2026

47

Parents

Publications

208

High-Q UHF micromechanical radial-contour mode disk resonators

J.R. Clark, Wan-Thai Hsu, M.A. Abdelmoneum et al. · Journal of Microelectromechanical Systems · 2005 · 275 citations

, , +15

Single wafer encapsulation of mems devices

Rob N. Candler, Woo‐Tae Park, G. Yama et al. · IEEE Transactions on Advanced Packaging · 2003 · 182 citations

, , +17

High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps

Siavash Pourkamali, A. Hashimura, Reza Abdolvand et al. · Journal of Microelectromechanical Systems · 2003 · 171 citations

, , +16

A Wireless, Passive Sensor for Quantifying Packaged Food Quality

Ee Lim Tan, Wen Ni Ng, Ranyuan Shao et al. · Sensors · 2007 · 163 citations · Full text

, , +17

On the nonlinear resonances and dynamic pull-in of electrostatically actuated resonators

Fadi Alsaleem, Mohammad I. Younis, Hassen M. Ouakad · Journal of Micromechanics and Microengineering · 2009 · 156 citations

, , +16

1–5 of 208

Authors

667

  1. FA
    Farrokh Ayazi

    Georgia Institute of Technology, United States

    19 publications · 1.2K citations

    16

    h-index

  2. CT
    Clark T.‐C. Nguyen

    University of Michigan, United States

    20 publications · 951 citations

    15

    h-index

  3. SP
    Siavash Pourkamali

    University of Denver, United States

    14 publications · 1K citations

    14

    h-index

  4. SL
    Sheng‐Shian Li

    National Tsing Hua University, Taiwan

    14 publications · 442 citations

    13

    h-index

  5. ZR
    Zeying Ren

    University of Michigan, United States

    9 publications · 327 citations

    9

    h-index

1–5 of 667

Institutions

206

  1. Georgia Institute of Technology

    Atlanta, United States

    16 h-index

    56 publications

    4K citations

  2. University of Michigan

    Ann Arbor, United States

    13 h-index

    45 publications

    2.8K citations

  3. University of California, Berkeley

    Berkeley, United States

    11 h-index

    39 publications

    957 citations

  4. National Tsing Hua University

    Hsinchu, Taiwan

    10 h-index

    33 publications

    843 citations

  5. Centre National de la Recherche Scientifique

    Paris, France

    6 h-index

    32 publications

    1.1K citations

  6. University of Denver

    Denver, United States

    5 h-index

    5 publications

    366 citations

  7. CEA Grenoble

    Grenoble, France

    5 h-index

    25 publications

    349 citations

  8. Tohoku University

    Sendai, Japan

    5 h-index

    15 publications

    265 citations

1–8 of 206

Venues

  1. Journal of Microelectromechanical Systems

    20 publications · 1.2K citations

    15

    h-index

  2. Sensors and Actuators A Physical

    9 publications · 377 citations

    9

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 9 publications · 505 citations

    9

    h-index

  4. IEEE Sensors Journal

    6 publications · 131 citations

    6

    h-index

  5. Electronics Letters

    6 publications · 131 citations

    6

    h-index

1–5