Concepedia
Statistics
Publications
68
Citations
2.6K
H-Index
30
Active since
2002
Affiliations
University of Denver(Current)
Georgia Institute of Technology
The University of Texas at Dallas
Oklahoma State University
Siavash Pourkamali is an author at University of Denver specializing in engineering, microelectronics, and microfabrication.
Top concepts
EngineeringMicrofabricationMicroelectronicsElectrical EngineeringApplied PhysicsMechanical EngineeringInstrumentationMicrofluidicsSensorsMechanical Systems
Publications per year
2002–2023
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
Siavash Pourkamali, A. Hashimura, Reza Abdolvand et al. · Journal of Microelectromechanical Systems · 2003 · 170 citations
Single Crystal Silicon, Photonics, Electrical Engineering +11
VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators—Part II: Implementation and Characterization
Siavash Pourkamali, Zhijian Hao, Farrokh Ayazi · Journal of Microelectromechanical Systems · 2004 · 123 citations
Electrical Engineering, Engineering, Microfabrication +10
Electronically Temperature Compensated Silicon Bulk Acoustic Resonator Reference Oscillators
K. Sundaresan, G.K. Ho, Siavash Pourkamali et al. · IEEE Journal of Solid-State Circuits · 2007 · 118 citations
Reference Oscillator, Engineering, High-frequency Device +8
VHF Single-Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators—Part I: Design and Modeling
Zhifei Hao, Siavash Pourkamali, Farrokh Ayazi · Journal of Microelectromechanical Systems · 2004 · 113 citations
Electrical Engineering, Vhf Single-crystal Silicon, Dynamic Behavior +7
High-Frequency Thermally Actuated Electromechanical Resonators With Piezoresistive Readout
Amir Rahafrooz, Siavash Pourkamali · IEEE Transactions on Electron Devices · 2011 · 105 citations
Engineering, Mechanical Engineering, Microactuator +18
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