Reza Abdolvand

Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications

Reza Abdolvand, Hossein Miri Lavasani, G.K. Ho et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2008 · 219 citations

Engineering, Oscillators, High-frequency Reference Oscillators +17

Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators

G.K. Ho, Reza Abdolvand, Abhishek Sivapurapu et al. · Journal of Microelectromechanical Systems · 2008 · 202 citations

Electrical Engineering, Engineering, Microfabrication +12

High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps

Siavash Pourkamali, A. Hashimura, Reza Abdolvand et al. · Journal of Microelectromechanical Systems · 2003 · 170 citations

Single Crystal Silicon, Photonics, Electrical Engineering +11

In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators

Brandon P. Harrington, Reza Abdolvand · Journal of Micromechanics and Microengineering · 2011 · 166 citations

Aeroacoustics, Engineering, Acoustic Metamaterial +17

An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon

Reza Abdolvand, Farrokh Ayazi · Sensors and Actuators A Physical · 2008 · 144 citations

Electrical Engineering, Wafer Scale Processing, Engineering +10