Publication | Open Access
Very high Q-factor resonators in monocrystalline silicon
79
Citations
8
References
1990
Year
Electrical EngineeringEngineeringHigh-frequency DeviceNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMonocrystalline Silicon
| Year | Citations | |
|---|---|---|
Page 1
Page 1