Chemical etching solutions for air gap formation using a sacrificial oxide/polymer approach - Concepedia

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Chemical etching solutions for air gap formation using a sacrificial oxide/polymer approach

17

Citations

3

References

2006

Year

F. Gaillard, J. de Pontcharra, L.G. Gosset, Ph. Lyan, D. Bouchu, R. Daamen, O. Louveau, P. Besson, G. Passemard, J. Torrès

Microelectronic Engineering

Materials ScienceChemical EngineeringEngineeringMicrofabricationMaterials FabricationSurface ScienceFabrication TechniqueSurface ModificationPlasma EtchingSurface ProcessingAir Gap FormationNanolithography MethodSacrificial Oxide/polymer Approach

References

	Year	Citations

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