The long path from MEMS resonators to timing products

E. Ng, Yushi Yang, Vu A. Hong, Chang-Nam Ahn, David B. Heinz, Ian B. Flader, Y. Chen, Camille L. M. Everhart, B. Kim, Renata Melamud,

2015 · 32 citations · 17 references

Concepts

Abstract

Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.

References

17