2015 · 32 citations · 17 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ReliabilityMems ResonatorsMems TestingRf MemsLong-path SolutionMicroelectromechanical OscillatorsMicromechanical OscillatorsResonant MemsResonator Arrays
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.
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Silicon as a mechanical material
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Hiroshi Henmi, S. Shoji, Y. Shoji et al. · Sensors and Actuators A Physical · 1994 · 230 citations
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