Ian B. Flader

Effective quality factor tuning mechanisms in micromechanical resonators

James M. L. Miller, Azadeh Ansari, David B. Heinz et al. · Applied Physics Reviews · 2018 · 137 citations · Full text

Engineering, Mechanical Engineering, Microactuator +16

Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon

Chae Hyuck Ahn, Eldwin J. Ng, Vu A. Hong et al. · Journal of Microelectromechanical Systems · 2014 · 135 citations

Materials Science, Photonics, Single Crystal Silicon +12

Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators

Xin Zhou, Chun Zhao, Dingbang Xiao et al. · Nature Communications · 2019 · 96 citations · Full text

Environmentally robust differential resonant accelerometer in a wafer-scale encapsulation process

Dongsuk D. Shin, Chae Hyuck Ahn, Yunhan Chen et al. · 2017 · 74 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13

A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices

Yushi Yang, Eldwin J. Ng, Yunhan Chen et al. · Journal of Microelectromechanical Systems · 2016 · 68 citations

Engineering, Mechanical Engineering, Cavity Pressure +22