Temperature Dependence of Quality Factor in MEMS Resonators

Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, +6

Journal of Microelectromechanical Systems

Electrical EngineeringEngineeringMems ResonatorsMicrofabricationMechanical Engineering +13

Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop

J. Salvia, Renata Melamud, Saurabh A. Chandorkar, +2

Journal of Microelectromechanical Systems

Electrical EngineeringEngineeringOscillatorsMicrofabricationReal-time Temperature Compensation +12

Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators

Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim, +7

Journal of Microelectromechanical Systems

EngineeringMechanical EngineeringPolysilicon EncapsulationVacuum DeviceHydrogen Gas +14

Temperature-Insensitive Composite Micromechanical Resonators

Renata Melamud, Saurabh A. Chandorkar, Bongsang Kim, +5

Journal of Microelectromechanical Systems

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringMicromechanics +9

Limits of quality factor in bulk-mode micromechanical resonators

Saurabh A. Chandorkar, Manu Agarwal, Renata Melamud, +3

Proceedings, IEEE micro electro mechanical systems

Materials ScienceSilicon ResonatorsEngineeringMicromechanicsMicrofabrication +12

SU-8 MEMS Fabry-Perot pressure sensor

Ginel C. Hill, Renata Melamud, F. Declercq, +4

Sensors and Actuators A Physical

EngineeringCalibrationSensor DesignInstrumentationSensor Technology +1

Temperature-compensated high-stability silicon resonators

Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, +4

Applied Physics Letters

Materials SciencePhotonicsEngineeringMicromachinesMicrofabrication +13

Multimode thermoelastic dissipation

Saurabh A. Chandorkar, Robert N. Candler, Amy Duwel, +4

Journal of Applied Physics

EngineeringMechanical EngineeringPassive Energy DissipationThermal EnergyMechanics +17

Thermal Isolation of Encapsulated MEMS Resonators

C.M. Jha, Matthew A. Hopcroft, Saurabh A. Chandorkar, +6

Journal of Microelectromechanical Systems

EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroactuatorMicro-electromechanical System +15

Optimal drive condition for nonlinearity reduction in electrostatic microresonators

Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, +6

Applied Physics Letters

EngineeringMicrofabricationApplied PhysicsOptimal Drive ConditionDouble-ended-tuning-fork Resonator +6