Temperature Dependence of Quality Factor in MEMS Resonators

Bongsang Kim, Matthew A. Hopcroft, Rob N. Candler, +6

Journal of Microelectromechanical Systems

Electrical EngineeringEngineeringMems ResonatorsMicrofabricationMechanical Engineering +13

Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators

Rob N. Candler, Matthew A. Hopcroft, Bongsang Kim, +7

Journal of Microelectromechanical Systems

EngineeringMechanical EngineeringPolysilicon EncapsulationVacuum DeviceHydrogen Gas +14

Limits of quality factor in bulk-mode micromechanical resonators

Saurabh A. Chandorkar, Manu Agarwal, Renata Melamud, +3

Proceedings, IEEE micro electro mechanical systems

Materials ScienceSilicon ResonatorsEngineeringMicromechanicsMicrofabrication +12

Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, +3

Sensors and Actuators A Physical

Electrical EngineeringWafer Scale ProcessingEngineeringMems ResonatorsMicrofabrication +4

Optimized Circuit Failure Prediction for Aging: Practicality and Promise

Manu Agarwal, Varsha Balakrishnan, Anshuman Bhuyan, +6

EngineeringVlsi DesignFlip-flop DesignsComputer ArchitectureHardware Security +14

Temperature-compensated high-stability silicon resonators

Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, +4

Applied Physics Letters

Materials SciencePhotonicsEngineeringMicromachinesMicrofabrication +13

Multimode thermoelastic dissipation

Saurabh A. Chandorkar, Robert N. Candler, Amy Duwel, +4

Journal of Applied Physics

EngineeringMechanical EngineeringPassive Energy DissipationThermal EnergyMechanics +17

Frequency stability of wafer-scale encapsulated MEMS resonators

Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, +3

Electrical EngineeringWafer Scale ProcessingEngineeringMems ResonatorsMicrofabrication +10

Thermal Isolation of Encapsulated MEMS Resonators

C.M. Jha, Matthew A. Hopcroft, Saurabh A. Chandorkar, +6

Journal of Microelectromechanical Systems

EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroactuatorMicro-electromechanical System +15

Optimal drive condition for nonlinearity reduction in electrostatic microresonators

Manu Agarwal, Saurabh A. Chandorkar, Rob N. Candler, +6

Applied Physics Letters

EngineeringMicrofabricationApplied PhysicsOptimal Drive ConditionDouble-ended-tuning-fork Resonator +6