Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

An integrated CMOS micromechanical resonator high-Q oscillator

Clark T.‐C. Nguyen, Roger T. Howe · IEEE Journal of Solid-State Circuits · 1999 · 391 citations

Monolithic High-q Oscillator, Electrical Engineering, Engineering +9

High-cycle fatigue of single-crystal silicon thin films

Christopher L. Muhlstein, Stuart B. Brown, Robert O. Ritchie · Journal of Microelectromechanical Systems · 2001 · 230 citations

Materials Science, Single Crystal Silicon, Engineering +15

Single wafer encapsulation of mems devices

Rob N. Candler, Woo‐Tae Park, G. Yama et al. · IEEE Transactions on Advanced Packaging · 2003 · 181 citations

Piezoresistive Accelerometers, Mems Devices, Engineering +17

Fatigue Failure in Polysilicon Not Due to Simple Stress Corrosion Cracking

H. Kahn, R. Ballarini, J. J. Bellante et al. · Science · 2002 · 172 citations

Materials Science, Fatigue Failure, Engineering +15

VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators—Part II: Implementation and Characterization

Siavash Pourkamali, Zhijian Hao, Farrokh Ayazi · Journal of Microelectromechanical Systems · 2004 · 123 citations

Electrical Engineering, Engineering, Microfabrication +10