Concepedia

Publication | Closed Access

Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

DOI

146

Citations

19

References

2006

Year

Bongsang Kim, Rob N. Candler, Matthew A. Hopcroft, Manu Agarwal, Woo‐Tae Park, Thomas W. Kenny
Sensors and Actuators A Physical

References

YearCitations

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