Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

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High-cycle fatigue of single-crystal silicon thin films

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Natural Sciences, Materials Engineering, Materials Science +16

Single wafer encapsulation of mems devices

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Engineering, Electrical Engineering, Materials Science +17

Fatigue Failure in Polysilicon Not Due to Simple Stress Corrosion Cracking

H. Kahn, R. Ballarini, J. J. Bellante et al. · Science · 2002 · 173 citations

Natural Sciences, Materials Engineering, Materials Science +17

VHF Single Crystal Silicon Capacitive Elliptic Bulk-Mode Disk Resonators—Part II: Implementation and Characterization

Siavash Pourkamali, Zhijian Hao, Farrokh Ayazi · Journal of Microelectromechanical Systems · 2004 · 123 citations

Engineering, Electrical Engineering, Materials Science +17