Publication | Closed Access
Investigation of heavily nitrogen-doped n+ 4H–SiC crystals grown by physical vapor transport
78
Citations
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References
2009
Year
Materials ScienceSemiconductor TechnologyEngineeringApplied PhysicsCondensed Matter PhysicsNitrogen-doped N+ 4H–sicPhysical Vapor TransportChemical Vapor Deposition
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