Journal of Crystal Growth · 2002 · 238 citations · 31 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor DefectsSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsDislocation BehaviorDislocation NetworksSilicon CarbideSilicon Carbide Crystal GrowthSilicon Epitaxy
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