Concepedia

Publication | Closed Access

4H-SiC epitaxial layer growth by trichlorosilane (TCS)

DOI

73

Citations

19

References

2008

Year

Francesco La Via, Gaetano Izzo, Marco Mauceri, Giuseppe Pistone, Guglielmo G. Condorelli, Laura M. S. Perdicaro, Giuseppe Abbondanza, L. Calcagno, G. Fóti, Danilo Crippa
Journal of Crystal Growth

References

YearCitations

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