Journal of Crystal Growth · 2008 · 75 citations · 19 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEpitaxial GrowthSemiconductor InterfacesSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsWide-bandgap SemiconductorsEpitaxial Film GrowthEpitaxial Thin-film GrowthSilicon Carbide
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Deep levels created by low energy electron irradiation in 4H-SiC
L. Storasta, J. P. Bergman, Erik Janzén et al. · Journal of Applied Physics · 2004 · 279 citations
Natural Sciences, Materials Engineering, Materials Science +17
High temperature CVD growth of SiC
A. Ellison, J. Zhang, Jeffrey M. Peterson et al. · Materials Science and Engineering B · 1999 · 89 citations
Natural Sciences, Materials Engineering, Materials Science +10