4H-SiC epitaxial layer growth by trichlorosilane (TCS)

Francesco La Via, Gaetano Izzo, Marco Mauceri, Giuseppe Pistone, Guglielmo G. Condorelli, Laura M. S. Perdicaro, Giuseppe Abbondanza, L. Calcagno, G. Fóti, Danilo Crippa

Journal of Crystal Growth · 2008 · 75 citations · 19 references

Concepts

References

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