Si implanted reactivation in GaN grown on sapphire using AlN and oxide cap layers

F. Cayrel, Anne Elisabeth Bazin, Mohamed Lamhamdi, Y. Benchanaa, O. Ménard, Arnaud Yvon, Emmanuel Collard, Daniel Alquier

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 15 citations · 13 references

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