Applied Physics Letters · 1997 · 14 citations · 12 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor MaterialsBipolar Junction TransistorsElectronics TechnologyMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor SurfacesSurface PassivationHeterojunction Bipolar TransistorsPassivationPassivation BehaviorPassivation MaterialsPassivation MechanismsPassivation Of SemiconductorsPassivation TechniquesReal-time Monitoring
The diluted S2Cl2 solution has been employed to treat the GaAs/AlGaAs heterojunction bipolar transistors. It is shown that the dc characteristics of the transistor could be improved significantly and the passivation effect is not subject to degradation by heating to 150 °C in atmospheric air and immersing in water. A real-time monitoring technique is proposed which provides good control of the passivation stopping point.
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