Concepedia

Vector Scanning

Vector Scanning is a direct-write electron beam lithography technique that belongs to the class of beam patterning methods, distinguished by its precise, coordinated movement of the electron beam along user-defined geometric paths to selectively expose regions of a resist-coated substrate.

20

Publications

507

Citations

72

Authors

24

Institutions

Publications per year

2017–2026

3

Variants

Vector Scan

Parents

Publications

20

Selectable Length Partial Scan: A Method to Reduce Vector Length

Steven Morley, Ralph Marlett · 2005 · 68 citations

, , +9

Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures

Erik H. Anderson, Volker Boegli, Lawrence P. Muray · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 61 citations

, , +8

A Novel Low-Cost Stereolithography Process Based on Vector Scanning and Mask Projection for High-Accuracy, High-Speed, High-Throughput, and Large-Area Fabrication

Chi Zhou, Hang Ye, Feng Zhang · Journal of Computing and Information Science in Engineering · 2014 · 41 citations

, , +16

1 µm MOSFET VLSI technology: Part VI—Electron-beam lithography

W. D. Grobman, H.E. Luhn, T.P. Donohue et al. · IEEE Transactions on Electron Devices · 1979 · 34 citations

, , +16

A vector-scan thermal-field emission nanolithography system

Mark Gesley, F. J. Hohn, R. Viswanathan et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 31 citations

, , +13

1–5 of 20

Authors

72

  1. MG
    Mark Gesley

    Oregon Social Learning Center, United States

    2 publications · 42 citations

    2

    h-index

  2. VB
    Volker Boegli

    Lawrence Berkeley National Laboratory, United States

    2 publications · 77 citations

    2

    h-index

  3. LY
    Lijun Yang

    Harbin Institute of Technology, China

    1 publications · 25 citations

    1

    h-index

  4. YL
    Yiming Lu

    Jilin University, China

    1 publications · 16 citations

    1

    h-index

  5. HS
    H. Sawaragi

    The University of Osaka, Japan

    1 publications · 15 citations

    1

    h-index

1–5 of 72

Institutions

24

  1. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    4 h-index

    14 publications

    405 citations

  2. Iwate University

    Morioka, Japan

    1 h-index

    2 publications

    42 citations

  3. University of Oregon

    Eugene, United States

    1 h-index

    2 publications

    52 citations

  4. Harbin Institute of Technology

    Harbin, China

    1 h-index

    2 publications

    50 citations

  5. Jilin Medical University

    Jilin City, China

    1 h-index

    5 publications

    80 citations

  6. University of Edinburgh

    Edinburgh, United Kingdom

    1 h-index

    1 publications

    20 citations

  7. Jilin University

    Changchun, China

    1 h-index

    5 publications

    80 citations

  8. University at Buffalo, State University of New York

    Buffalo, United States

    1 h-index

    3 publications

    123 citations

1–8 of 24

Venues

  1. 3

    h-index

  2. Journal of Vacuum Science and Technology

    2 publications · 40 citations

    2

    h-index

  3. Review of Scientific Instruments

    1 publications · 26 citations

    1

    h-index

  4. Scanning

    1 publications · 25 citations

    1

    h-index

  5. 1

    h-index

1–5