Concepedia
Statistics
Publications
7
Citations
136
H-Index
Active since
1988
Affiliations
The University of Osaka(Current)
JEOL (Japan)
JEOL (United States)
H. Sawaragi is an author at The University of Osaka specializing in natural sciences, electronic materials, and ion implantation.
Publications per year
1988–2007
A 0–30 keV low-energy focused ion beam system
H. Kasahara, H. Sawaragi, R. Aihara et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 39 citations
Natural Sciences, Materials Science, Physics +13
Defect study in GaAs bombarded by low-energy focused ion beams
Kenji Gamo, Hideto Miyake, Yoshihiko Yuba et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 21 citations
Engineering, Materials Engineering, Materials Science +17
Optical system for a low-energy focused ion beam
R. Aihara, H. Kasahara, H. Sawaragi et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 17 citations
Natural Sciences, Materials Science, Physics +11
Application of medium energy nuclear microprobe to semiconductor process steps
Mikio Takai, Takehisa Kishimoto, Ryou Mimura et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 17 citations
Engineering, Electrical Engineering, Nuclear Engineering +8
Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function
H. Sawaragi, Hironobu Manabe, H. Kasahara et al. · Japanese Journal of Applied Physics · 1989 · 15 citations
Engineering, Manufacturing Engineering, Biomedical Optics +12
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