Kenji Gamo

Novel class of low molecular-weight organic resists for nanometer lithography

Motoko Yoshiiwa, Hiroshi Kageyama, Yasuhiko Shirota et al. · Applied Physics Letters · 1996 · 99 citations

Engineering, Electron-beam Lithography, Organic Electronics +18

Novel Electron-Beam Molecular Resists with High Resolution and High Sensitivity for Nanometer Lithography

Toshiaki Kadota, Hiroshi Kageyama, Fujio Wakaya et al. · Chemistry Letters · 2004 · 66 citations

Engineering, Electron-beam Lithography, Novel Electron-beam Molecular +18

Maskless ion beam assisted deposition of W and Ta films

Kenji Gamo, Daisuke Takehara, Yutaka Hamamura et al. · Microelectronic Engineering · 1986 · 59 citations

Materials Science, Ion Implantation, Engineering +7

Direct fabrication of nano-gap electrodes by focused ion beam etching

Takashi Nagase, Kenji Gamo, Tohru Kubota et al. · Thin Solid Films · 2005 · 58 citations

Materials Science, Engineering, Electron-beam Lithography +9

Selenium implantation in GaAs

Kenji Gamo, T. Inada, S. Krekeler et al. · Solid-State Electronics · 1977 · 53 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +4