T. Inada

Reordering of implanted amorphous layers in gaas

K. Gamo, T. Inada, J. W. Mayer et al. · Radiation Effects · 1977 · 69 citations

Semiconductors, Materials Science, Electrical Engineering +14

Selenium implantation in GaAs

Kenji Gamo, T. Inada, S. Krekeler et al. · Solid-State Electronics · 1977 · 53 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +4

Silicon implantation in epitaxial GaN layers: Encapsulant annealing and electrical properties

Shinichiro Matsunaga, S. Yoshida, Takayuki Kawaji et al. · Journal of Applied Physics · 2004 · 44 citations

Engineering, Epitaxial Gan Layers, Encapsulant Annealing +18

AlN capped annealing of Si implanted semi-insulating GaAs

S. Okamura, H. Nishi, T. Inada et al. · Applied Physics Letters · 1982 · 40 citations

Semiconductors, Materials Science, Electrical Engineering +13

Tellurium implantation in GaAs

F. H. Eisen, B.M. Welch, Helmut Müller et al. · Solid-State Electronics · 1977 · 38 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +5