Statistics
Publications
7
Citations
220
H-Index
7
Active since
1986
Yutaka Hamamura is an author at Nikon (Japan) specializing in engineering, applied physics, and optoelectronics.
Publications per year
1986–2020
7
7
Maskless ion beam assisted deposition of W and Ta films
Kenji Gamo, Daisuke Takehara, Yutaka Hamamura et al. · Microelectronic Engineering · 1986 · 59 citations
Atsushi Motogaito, Motoo Yamaguchi, Kazumasa Hiramatsu et al. · Japanese Journal of Applied Physics · 2001 · 17 citations
Ultraviolet Light, Electrical Engineering, Mesa Structures +11
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