Motoko Yoshiiwa

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Publications

Citations

151

H-Index

Active since

1996

Affiliations

The University of Osaka(Current)

Motoko Yoshiiwa is an author at The University of Osaka specializing in materials science, electron beam resist materials, and electron beam lithography.

Publications per year

1996–2001

Publications

Novel class of low molecular-weight organic resists for nanometer lithography

Motoko Yoshiiwa, Hiroshi Kageyama, Yasuhiko Shirota et al. · Applied Physics Letters · 1996 · 100 citations

Natural Sciences, Materials Engineering, Materials Science +9

Creation of low-molecular-weight organic resists for nanometer lithography

Toshiaki Kadota, Motoko Yoshiiwa, Hiroshi Kageyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +11

1,3,5-Tris(4-(tert-Butoxycarbonylmethoxy)-phenyl)benzene as a Novel Electron-beam Positive Resist for Nanometer Lithography.

Motoko Yoshiiwa, Hiroshi Kageyama, Fujio Wakaya et al. · Journal of Photopolymer Science and Technology · 1996 · 22 citations · Full text

Engineering, Electrical Engineering, Materials Science +9

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