Concepedia
Statistics
Publications
4
Citations
92
H-Index
Active since
1988
Affiliations
JEOL (Japan)(Current)
JEOL (United States)
The University of Osaka
H. Kasahara is an author at JEOL (Japan) specializing in materials science, ion implantation, and electronic materials.
Publications per year
1988–1989
A 0–30 keV low-energy focused ion beam system
H. Kasahara, H. Sawaragi, R. Aihara et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 39 citations
Natural Sciences, Materials Science, Physics +13
Defect study in GaAs bombarded by low-energy focused ion beams
Kenji Gamo, Hideto Miyake, Yoshihiko Yuba et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 21 citations
Engineering, Materials Engineering, Materials Science +17
Optical system for a low-energy focused ion beam
R. Aihara, H. Kasahara, H. Sawaragi et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 17 citations
Natural Sciences, Materials Science, Physics +11
Performance of a Focused-Ion-Beam Implanter with Tilt-Writing Function
H. Sawaragi, Hironobu Manabe, H. Kasahara et al. · Japanese Journal of Applied Physics · 1989 · 15 citations
Engineering, Manufacturing Engineering, Biomedical Optics +12
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