Concepedia
Statistics
Publications
6
Citations
132
H-Index
Active since
1987
Affiliations
JEOL (Japan)(Current)
The University of Osaka
JEOL (United States)
R. Aihara is an author at JEOL (Japan) specializing in materials science, engineering, and electronic materials.
Publications per year
1987–1991
A 0–30 keV low-energy focused ion beam system
H. Kasahara, H. Sawaragi, R. Aihara et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 39 citations
Natural Sciences, Materials Science, Physics +13
High spatial resolution secondary ion mass spectrometry with parallel detection system
Y. Nihei, Hiroaki Satoh, S. Tatsuzawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 21 citations
Natural Sciences, Chemistry, Analytical Chemistry +13
Defect study in GaAs bombarded by low-energy focused ion beams
Kenji Gamo, Hideto Miyake, Yoshihiko Yuba et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 21 citations
Engineering, Materials Engineering, Materials Science +17
Ion beam assisted etching of GaAs by low energy focused ion beam
Takanobu Kosugi, Kenji Gamo, S. Namba et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 19 citations
Engineering, Materials Engineering, Materials Science +14
Optical system for a low-energy focused ion beam
R. Aihara, H. Kasahara, H. Sawaragi et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 17 citations
Natural Sciences, Materials Science, Physics +11
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