Yoshihiko Yuba

Characterization of ion beam etching induced defects in GaAs

Yoshihiko Yuba, Tomohiro Ishida, Kenji Gamo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 31 citations

Semiconductor Technology, Electrical Engineering, Ion Implantation +10

Nanostructure fabrication of InP by low energy ion beams

Yoshihiko Yuba, Sumiaki Hazama, Kenji Gamo · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 25 citations

Nanostructure Fabrication, Ion Implantation, Engineering +3

Defects induced by focused ion beam implantation in GaAs

Hideto Miyake, Yoshihiko Yuba, Kenji Gamo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 25 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +12

Induced Defects in GaAs Etched by Low Energy Ions in Electron Beam Excited Plasma (EBEP) System

Jin-Zhong Yu, Norio Masui, Yoshihiko Yuba et al. · Japanese Journal of Applied Physics · 1989 · 25 citations

Semiconductors, Gaas Etched, Electrical Engineering +14

Laser annealing of ohmic contacts on GaAs

A. H. Oraby, K. Murakami, Yoshihiko Yuba et al. · Applied Physics Letters · 1981 · 24 citations

Materials Science, Backside Irradiation, Au-ge Ohmic Contacts +15