Statistics
Publications
47
Citations
1.1K
H-Index
22
Active since
1970
Affiliations
Kenji Gamo is an author at The University of Osaka specializing in materials science, electronic materials, and natural sciences.
Publications per year
1970–1997
47
47
Kenji Gamo · Microelectronic Engineering · 1996 · 62 citations
Molecular layer etching of GaAs
Yoshinobu Aoyagi, Kohji Shinmura, Kiyoshi Kawasaki et al. · Applied Physics Letters · 1992 · 59 citations
100 keV focused ion beam system with a <i>E</i>×<i>B</i> mass filter for maskless ion implantation
Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 44 citations
Engineering, Electrical Engineering, Electronic Materials +7
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