Pil Hyon Kim

100 keV focused ion beam system with a <i>E</i>×<i>B</i> mass filter for maskless ion implantation

Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 44 citations

Flash Lamp Pumped Tunable Forsterite Laser

Akiko Sugimoto, Yusaburo Segawa, Yasuhide Yamaguchi et al. · Japanese Journal of Applied Physics · 1989 · 28 citations

Materials Science, Photonics, Sio 4 +13

30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam

Takao Shiokawa, Yoshinobu Aoyagi, Pil Hyon Kim et al. · Japanese Journal of Applied Physics · 1984 · 22 citations

Engineering, Electron-beam Lithography, Microscopy +16

Energies of Ions Produced by Laser Irradiation

Susumu Namba, Pil Hyon Kim, Akira Mitsuyama · Journal of Applied Physics · 1966 · 20 citations

Physics, Relativistic Laser-matter Interaction, Applied Physics +2

200 kV Mass-Separated Fine Focused Ion Beam Apparatus

Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Japanese Journal of Applied Physics · 1985 · 19 citations

Beam Diameter, Electrical Engineering, Kv Mass-separated Fine +14