Pil Hyon Kim

100 keV focused ion beam system with a <i>E</i>×<i>B</i> mass filter for maskless ion implantation

Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 44 citations

Engineering, Electrical Engineering, Electronic Materials +7

Flash Lamp Pumped Tunable Forsterite Laser

Akiko Sugimoto, Yusaburo Segawa, Yasuhide Yamaguchi et al. · Japanese Journal of Applied Physics · 1989 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +16

30 nm Line Fabrication on PMMA Resist by Fine Focused Be Ion Beam

Takao Shiokawa, Yoshinobu Aoyagi, Pil Hyon Kim et al. · Japanese Journal of Applied Physics · 1984 · 22 citations

Engineering, Materials Engineering, Materials Science +11

Energies of Ions Produced by Laser Irradiation

Susumu Namba, Pil Hyon Kim, Akira Mitsuyama · Journal of Applied Physics · 1966 · 20 citations

Natural Sciences, Physics, Radiation Physics +3

200 kV Mass-Separated Fine Focused Ion Beam Apparatus

Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Japanese Journal of Applied Physics · 1985 · 19 citations

Natural Sciences, Chemistry, Analytical Chemistry +10