Takao Shiokawa

Lithographic approach for 100 nm fabrication by focused ion beam

Shinji Matsui, Katsumi Mori, K. Saigo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 56 citations

Engineering, Electron-beam Lithography, Microscopy +17

100 keV focused ion beam system with a <i>E</i>×<i>B</i> mass filter for maskless ion implantation

Takao Shiokawa, Pil Hyon Kim, K. Toyoda et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 44 citations

Characteristics of maskless ion beam assisted etching of silicon using focused ion beams

Yukinori Ochiai, Kazuhiko Shihoyama, Takao Shiokawa et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 32 citations

Materials Science, Electrical Engineering, Ion Implantation +14

Formation of High Resistance Region in GaAs by Ga Focused-Ion-Beam Implantation

Kazuo Nakamura, T. Nozaki, Takao Shiokawa et al. · Japanese Journal of Applied Physics · 1985 · 26 citations

Semiconductor Technology, Electrical Engineering, Ion Implantation +11

Defects induced by focused ion beam implantation in GaAs

Hideto Miyake, Yoshihiko Yuba, Kenji Gamo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 25 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +12