Concepedia
Statistics
Publications
13
Citations
277
H-Index
11
Active since
1980
Affiliations
NEC (Japan)(Current)
University of Maryland, College Park
Tokyo Institute of Technology
K. Saigo is an author at NEC (Japan) specializing in engineering, chemistry, and materials science.
Top concepts
EngineeringChemistryMaterial ScienceApplied PhysicsPolymer ChemistryOrganic ChemistryPolymersPolymer SciencePolymer SynthesisOptoelectronics
Publications per year
1980–1989
Lithographic approach for 100 nm fabrication by focused ion beam
Shinji Matsui, Katsumi Mori, K. Saigo et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 56 citations
Engineering, Electron-beam Lithography, Microscopy +17
Copolymers of Trimethylsilylstyrene with Chloromethylstyrene for a Bi‐Layer Resist System
Masaru Suzuki, K. Saigo, H. Gokan et al. · Journal of The Electrochemical Society · 1983 · 32 citations
Engineering, Chemistry, Polymers +16
Polymerization of bicyclic ortho esters
Takeshi Endo, K. Saigo, William J. Bailey · Journal of Polymer Science Polymer Letters Edition · 1980 · 32 citations
Engineering, Polymer Science, Bicyclic Ortho Esters +7
A Silicon Containing Positive Photoresist (SIPR) for a Bilayer Resist System
Yasunori Saotome, H. Gokan, K. Saigo et al. · Journal of The Electrochemical Society · 1985 · 31 citations
Engineering, Optoelectronic Devices, Integrated Circuits +19
Silicon-Containing Resists For Bi-Layer Resist Systems
Y. Ohnishi, M. Suzuki, K. Saigo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1985 · 21 citations
Materials Science, Materials Engineering, Electrical Engineering +15
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