Concepedia

H. Gokan

HG

19

Publications

614

Citations

14

H-Index

1981

Active since

Affiliations

NEC (Japan)(Current)

Nippon Electric Glass (Japan)

H. Gokan is an author at NEC (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMicroelectronicsMicrofabricationChemistryMaterials EngineeringElectrical EngineeringPolymer Science

Publications per year

1981–1989

19

Publications

19

Dry Etch Resistance of Organic Materials

H. Gokan, S. Esho, Y. Ohnishi · Journal of The Electrochemical Society · 1983 · 259 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Pattern fabrication by oblique incidence ion-beam etching

H. Gokan, S. Esho · Journal of Vacuum Science and Technology · 1981 · 36 citations

Materials Science, Electrical Engineering, Side Wall Contour +13

Copolymers of Trimethylsilylstyrene with Chloromethylstyrene for a Bi‐Layer Resist System

Masaru Suzuki, K. Saigo, H. Gokan et al. · Journal of The Electrochemical Society · 1983 · 32 citations

Engineering, Chemistry, Polymers +16

A Silicon Containing Positive Photoresist (SIPR) for a Bilayer Resist System

Yasunori Saotome, H. Gokan, K. Saigo et al. · Journal of The Electrochemical Society · 1985 · 31 citations

Engineering, Optoelectronic Devices, Integrated Circuits +19

Sputtering Yield of Carbon Atoms in Organic Materials for Oxygen Bombardment

H. Gokan, S. Esho · Journal of The Electrochemical Society · 1984 · 28 citations · Full text

Materials Science, Chemical Engineering, Carbonization +13

Rows per page

1–5 of 19