Y. Ohnishi

Dry Etch Resistance of Organic Materials

H. Gokan, S. Esho, Y. Ohnishi · Journal of The Electrochemical Society · 1983 · 259 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Ultrahigh resolution of calixarene negative resist in electron beam lithography

Jun‐ichi Fujita, Y. Ohnishi, Yukinori Ochiai et al. · Applied Physics Letters · 1996 · 242 citations

Engineering, Electron-beam Lithography, Microscopy +16

Nanometer-scale resolution of calixarene negative resist in electron beam lithography

Jun‐ichi Fujita, Y. Ohnishi, Yukinori Ochiai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 65 citations

Engineering, Electron-beam Lithography, Microscopy +25

Microwave Spectrum of Cyclohexanone

Y. Ohnishi, Kunio Kozima · Bulletin of the Chemical Society of Japan · 1968 · 47 citations · Full text

Microwave Spectroscopy, Total Dipole Moment, Engineering +14

Oxygen reactive ion etching of organosilicon polymers

Fumiya Watanabe, Y. Ohnishi · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 43 citations

Engineering, Chemistry, Silicon On Insulator +16