Concepedia

Y. Ohnishi

YO

18

Publications

933

Citations

14

H-Index

1968

Active since

Affiliations

NEC (Japan)(Current)

Y. Ohnishi is an author at NEC (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsChemistryChemical EngineeringPolymer ScienceSurface SciencePolymer ChemistryElectronic MaterialsPhysics

Publications per year

1968–1998

18

Publications

18

Dry Etch Resistance of Organic Materials

H. Gokan, S. Esho, Y. Ohnishi · Journal of The Electrochemical Society · 1983 · 259 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Ultrahigh resolution of calixarene negative resist in electron beam lithography

Jun‐ichi Fujita, Y. Ohnishi, Yukinori Ochiai et al. · Applied Physics Letters · 1996 · 242 citations

Engineering, Electron-beam Lithography, Microscopy +16

Nanometer-scale resolution of calixarene negative resist in electron beam lithography

Jun‐ichi Fujita, Y. Ohnishi, Yukinori Ochiai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 65 citations

Engineering, Electron-beam Lithography, Microscopy +25

Microwave Spectrum of Cyclohexanone

Y. Ohnishi, Kunio Kozima · Bulletin of the Chemical Society of Japan · 1968 · 47 citations · Full text

Microwave Spectroscopy, Total Dipole Moment, Engineering +14

Oxygen reactive ion etching of organosilicon polymers

Fumiya Watanabe, Y. Ohnishi · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 43 citations

Engineering, Chemistry, Silicon On Insulator +16

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