Concepedia

Norihiko Samoto

NS

Statistics

Publications

9

Citations

336

H-Index

9

Active since

1983

Affiliations

The University of Osaka(Current)

Norihiko Samoto is an author at The University of Osaka specializing in materials science, materials engineering, and natural sciences.

Publications per year

1983–1997

9

Publications

9

Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo, Nobuyuki Takakura, Norihiko Samoto et al. · Japanese Journal of Applied Physics · 1984 · 124 citations

Natural Sciences, Materials Engineering, Materials Science +11

Theoretical study of the ultimate resolution in electron beam lithography by Monte Carlo simulation, including secondary electron generation: Energy dissipation profile in polymethylmethacrylate

Norihiko Samoto, Ryuichi Shimizu · Journal of Applied Physics · 1983 · 40 citations

Natural Sciences, Materials Science, Physics +17

A study of acid diffusion in chemically amplified deep ultraviolet resist

Toshiro Itani, Hiroshi Yoshino, Shuichi Hashimoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +13

Changes of Volume and Surface Compositions of Polymethylmethacrylate under Electron Beam Irradiation in Lithography

Norihiko Samoto, Ryuichi Shimizu, Hatsujiro Hashimoto · Japanese Journal of Applied Physics · 1985 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +17

Polymer structure effect on dissolution characteristics and acid diffusion in chemically amplified deep ultraviolet resists

Toshiro Itani, Shuichi Hashimoto, Mitsuharu Yamana et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +13

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