Application of medium energy nuclear microprobe to semiconductor process steps

High resolution imaging with high energy ion beams

G.J.F. Legge, Jamie S. Laird, L.M. Mason et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 44 citations

Natural Sciences, Biomedical Engineering, Radiology +10

Microanalysis by Focused MeV Helium Ion Beam

Mikio Takai, Kouji Matsunaga, K. Inoue et al. · Japanese Journal of Applied Physics · 1987 · 34 citations

Natural Sciences, Materials Science, Physics +11

Enhanced electron emission from <i>n</i>-type porous Si field emitter arrays

M. Takai, Masatsugu Yamashita, Hans‐Christian Wille et al. · Applied Physics Letters · 1995 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Single event upset imaging with a nuclear muprobe

Barney L. Doyle, K.M. Horn, D.S. Walsh et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 33 citations · Full text

Engineering, Nuclear Engineering, Nuclear Safety Analysis +3

Nuclear microprobe development and application to microelectronics

Takai Mikio · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 19 citations

Engineering, Materials Science, Nuclear Engineering +5